• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:

    公开号:SE537033C2
    申请号:SE1150498
    申请日:2009-11-30
    公开日:2014-12-09
    发明作者:Hyun Mo Cho；Yong Jai Cho；Won Chegal
    申请人:Korea Res Inst Of Standards；
    IPC主号:
    专利说明:

    537 033 A conventional ellipsometer can be applied to a semiconductor sample, but cannot be applied to a biomaterial such as protein. Preferably, a surface plasmon resonance (SPR) sensor is used to measure biomaterial properties.
    Electrons on a surface of a metal are collectively vibrating by normal directional vibrations with respect to the surface of the metal, and this movement is called "surface wave motion". The vibrations of the quantized electrons are the surface plasmon. In order to quantitatively analyze a material which utilizes a phenomenon where surface plasmon is excited by light waves, there have been various SPR sensors.
    The resonance phenomenon of the surface plasma is applied to a polarizer, or is applied mainly to a biosensor, ie an optochemical sensor by exploiting the sensitivity with respect to the polarizing properties of the light.
    A sensor which utilizes the resonant damping effect of the surface plasma, i.e. a surface plasma sensor is used to measure a change in a concentration, a thickness or refractive index of a dielectric substance in contact with the metal surface, and can also be used as a biosensor to measure a change in a concentration of a sample as a biomaterial in real time without labeling.
    Fig. 1 shows an example of a conventional SPR sensor.
    As shown in the drawing, the SPR sensor comprises a light source 110, a polarizer 120 for polarizing light emitted from the light source 110, a prism 130 in which the polarized light is incident and then reflected, a glass substrate 140 which is provided on a surface of the prism 130. and to which the polarized light passing through the prism 130 is incident, a thin metal film 150 which is coated on the glass substrate 140 having a nanometer thickness so that the polarized light passing through the glass substrate 140 is reflected by the surface plasmon resonance, and a light receiving portion 160 for detecting the light. which is reflected by the thin metal film and passes through the glass substrate 140 and the prism 130. At the same time, the thin metal film is in contact with a sample 170. If the concentration, thickness or refractive index of the sample 170 changes between the thin metal film 150 and the sample 170, the conditions for SPR to change accordingly. Thus, the amount of reflected light changes to the light receiving portion 160, and the change in the concentration in the sample 170 in contact with the thin metal film 150 is measured by utilizing this phenomenon.
    The SPR measurement is performed under optimal SPR conditions. However, since the conventional SPR sensor uses only a reflectance ratio, the optical SPR conditions with respect to the phase change are not sensitively changed, and thus the measurement accuracy is deteriorated.
    In particular, when a low molecular weight material which is used as a new drug candidate is conjugated to the target protein, it is required to provide it with extremely accurate precision measurements. However, with the conventional SPR sensor, it is difficult to perform the high precision measurement.
    In addition, since the conventional SPR measurement is restrictively performed on only one local region, it is impossible to measure a sample which has several channels.
    Summary of the Invention and Solution to the Problem An embodiment of the present invention is directed to providing a multi-channel surface plasmon resonance sensor utilizing beam profile ellipsometry, which can be applied to a sample having multiple channels, and also provides a very accurate precision measurement by allowing the optimal SPR conditions. with respect to the phase change to be sensitively changed.
    To achieve the object of the present invention, the present invention provides a multi-channel surface plasmon resonance sensor utilizing beam profile ellipsometry, comprising a vertical illumination beam beam elliptometer in which the light is polarized, a portion of the polarized light being focused on a thin metal having 42 channels. an objective lens portion, and then the polarized light reflected from the thin metal film 42 is detected to measure an ellipsometric phase change; a surface plasmon resonance (SPR) sensing portion 40 which is provided on the objective lens portion of the beam ellipsoometer to generate SPR according to an angular change of the polarized light; and a multi-channel flow unit 1 which supplies a buffer solution containing a biomaterial bond to or separating from the thin metal film 42 which generates surface plasmon, wherein SPR and the ellipsometric phase change by change in an angle and a wavelength are detected simultaneously.
    Preferably, the vertical illumination beam beam elliptometer comprises a light source 10; a polarizer 20 for polarizing the emitted light from the light source 10; a beam splitter 30 for dividing the polarized light from the polarizer 20; an objective lens 41, 43 for focusing a portion of the polarized divided light from beam splitter 30 into a thin metal film 42 having multiple channels; an analysis means 50 for polarizing the light which is linearly reflected from the thin metal film 42 and passing through the beam splitter 30, and for detecting the polarized light; an imaging module 60 for imaging the light detected by the analyzing means 50; an optical detector 70 for detecting amplitude and phase of the light imaged by the imaging module 60; and a processing device 80 for processing the ellipsometric phase change which has been detected by the optical detector 70.
    Preferably, light source 10 is one of a light source for emitting a short wavelength or a wavelength band of an ultraviolet beam, visible beam or an infrared beam, and a wavelength variable light source of a wavelength variable laser or diode.
    Preferably, the analyzing means 50 is one of an analyzer, a simple polarizing beam splitter, a beam splitter and a polarizer.
    Preferably, the SPR sensing portion 40 includes a first lens 41, which is a cylindrically shaped converging lens for linearly focusing a portion of the polarized light; and a second lens 43 which is a single cylindrical lens or a group of cylindrical lenses such as the thin metal film 42 which is deposited on a last lens surface, to obtain a high numerical aperture together with the first lens 41.
    Preferably, the SPR sensing portion 40 includes a third lens 44 which is formed into a single cylindrical lens or a group of cylindrical lenses for linearly focusing a portion of the polarized light; a glass substrate 45, which is provided on an underside of the third lens 44 and of which an underside is deposited with the thin metal film 42; and a matching refractive index material 46 which is applied between the third lens 44 and the glass substrate 45 to match a refractive index of the third lens 44 and the refractive index of the glass substrate 45 to each other.
    Preferably, the multichannel surface plasmon resonance sensor further comprises means for rotating the polarizer 20 or the analyzer 50 in a vertical direction to a light direction or for modulating the polarization of the light, so that the linear light detected by the analyzer 50 can be detected at each incident angle of the optical detector. 70.
    Preferably, the multi-channel surface plasmon resonance sensor further comprises a compensator 90 which is arranged between the beam splitter 30 and the SPR sensing portion 40 or between beam splitter 30 and the optical detector 70 to compensate for the divided light from beam splitter 30.
    Preferably, the multi-channel surface plasmon resonance sensor further comprises a rotating means for rotating the compensator 90 in a vertical direction to a light direction, so that the light compensated by compensator 90 can be detected at each incident angle of the analyzer 50 to provide multi-channel information in accordance with a change in 10 15 20 25 30 35 537 033 position.
    Preferably, the multichannel surface plasmon resonance sensor further comprises a collimator 100 which is arranged between the light source 10 and the polarizer 20 to convert the light emitted from the light source 10 into parallel light and then transmit the parallel light to the polarizer 20.
    Preferably, the SPR sensing portion 40 includes a first lens 41, which is a cylindrically shaped converging lens for linearly focusing a portion of the polarized light; a second lens 43 which is a single cylindrical lens or a group of cylindrical lenses to obtain a high numerical aperture, together with the first lens 41; a glass substrate 45, which is provided on an underside of the second lens 43 and of which an underside is deposited with the thin metal film 42; and a matching refractive index material 46 which is applied between the second lens 43 and glass substrate 45 to match a refractive index of the second lens 43 and a refractive index of glass substrate 45 with each other.
    Preferably, the converging lens 41 is formed into one of a biconvex shape, a plano convex shape and a meniscus shape.
    Advantages of the invention In accordance with the present invention, it is possible to easily measure the sample which has several channels, and it is also possible to measure a conjugation property and a dynamic conjugation property of biomaterial in real time by simultaneously measuring the amplitude and phase of the light and thus simultaneously measuring the ellipsometric phase change and the SPR measurement which are caused by the angular change and the phase change. Furthermore, since it is possible to perform the measurement in optimal SPR conditions in which the phase change is sensitive, it is possible to perform the higher more accurate measurement than the conventional SPR measurement using only the reflectability.
    While the present invention has been described with respect to particular embodiments, it will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the following claims.
    Brief Description of the Figures Fig. 1 is a schematic view of a conventional surface plasmon resonance (SPR) sensor, Fig. 2 is a view showing a structure of a multi-channel SPR sensor utilizing beam profile ellipsometry in accordance with the present invention, 537 033 Fig. 3 is a view showing an optical detection path, Fig. 4 is a view showing a structure of another type of multi-channel SPR sensor using beam profile ellipsometry in accordance with the present invention, Fig. 5 is a diagram showing a change in SPR the angle according to a wavelength when the BK7 lens is used, Fig. 6 is a diagram showing an inclination of a phase change according to a wavelength and an angle.
    Detailed description of the main elements 1: multi-channel flow unit thin biofilm buffer solution light source 1a: 1b: 10: 20: 30: 40: 41: 42: 43: 44: 45: 46: 50: 60: 70: 80: 90: compensator 100: collimator polarizer beam splitter objective lens first lens thin metal film second lens third lens glass substrate matching refractive index material analyzer imaging module optical detector processing unit Embodiments of the Invention The present invention relates to a multi-channel surface plasma resonance sensor utilizing a multiple incident angular measurement method and a surface plasmon resonance (SPR) sensing portion deposited with a thin metal film (or a high numerical objective lens aperture, a matching refractive index material, a glass substrate deposited with a thin metal film), to allow real-time SP R-measurements with respect to a sample which has a small channel. The ellipsometry can simultaneously measure the amplitude and phase of the light which is reflected from a surface of a sample. In particular, if the beam profile ellipsometry is performed under optimal SPR conditions in which a phase change is sensitive, it is possible to perform measurements which have higher precision than a conventional SPR measurement method which uses only a reflectance ratio. A conventional light beam lipometer is used in a semiconductor sample and has no connection with an SPR measurement of the present invention.
    In the following, multi-channel surface plasmon resonance sensor utilizing beam profile ellipsometry will be fully described with reference to the drawings.
    Fig. 2 is a view showing a structure of a multi-channel SPR sensor with beam profile ellipsometry in accordance with the present invention, fi g. Fig. 3 is a view showing an optical detection path and Fig. 4 is a view showing a structure of another type of multi-channel SPR sensor utilizing beam profile ellipsometry in accordance with the present invention.
    As shown in the figures, a multi-channel SPR sensor utilizing beam profile ellipsometry in accordance with the present invention includes a vertical illumination beam beam elliptometer having a light source 10, a first polarizer 20 for polarizing light emitted from the light source 10 for dividing beams 30. polarized light, an objective lens 41, 43 for focusing a portion of the divided polarized light into a thin metal film 42, an analyzer 50 for polarizing the light reflected from the thin metal film 42 and detecting polarized light, an imaging module 60 for imaging the light detected by the analyzer 50, an optical detector 70 for detecting amplitude and phase of the polarized light and simultaneously detecting multi-channel SPR and ellipsometric phase change caused by the angular change and phase change, and a processing device 80 for processing the detected SPR and the ellipsic change. ; an SPR sensing portion 40 which includes the thin metal film 42 which is coupled to the objective lens 43 by the collecting beam ellipsoometer to generate the SPR caused by angular changes; and a multi-channel flow unit 1 which supplies a buffer solution comprising a biomaterial bonding to or separating from the thin metal film 42 which generates the surface plasma.
    The light source 10 can emit a short wavelength or a wavelength band of an ultraviolet beam, visible beam or an infrared beam. Further, the light source 10 may be a wavelength variable light source of a wavelength variable laser or diode and the like to perform the measurement at a desired wavelength appropriate to the optimum sensitivity ratio of SPR according to a thickness definition in the thin metal film 42. .
    When a white light source is used as the light source 10, a monochromator 110 is further provided between the light source 10 and the polarizer 20, or the monochromator (not shown) is provided at the analyzer 50.
    The task of the polarizer 20 is to polarize the light emitted from the light source 10.
    The beam splitter 30 divides the polarized light from the polarizer 20 and transmits a portion of the divided light to the SPR sensing portion 40.
    The SPR sensing part 40 focuses towards the thin metal film 42 a part of the polarized divided light from beam splitter 30. At this time, the multi-channel flow unit 1 which supplies the buffer solution 1b including biomaterial includes a thin bio-film 1a and a small channel 1c which is formed at an underside of the thin film 1a so that it can be filled with the buffer solution 1b.
    For example, as shown in Fig. 2, the SPR sensing portion 40 includes two lenses, i.e., a first lens 41, which is a cylindrically shaped converging lens for linearly focusing a portion of the polarized divided light from beam splitter 30, and a second lens 43 which is a single cylindrical lens or a group of cylindrical lenses on which the thin metal film 42 is deposited on a surface of the lens, to obtain a high numerical aperture together with the first lens 41.
    The converging lens can be formed into a biconvex shape, a plano convex shape or a meniscus shape.
    After a portion of the polarized divided light from the beam splitter 30 is focused by the first lens 41, the polarized light focused by the first lens 41 is focused on the thin metal film 42 through the second lens 43. At this time, the second lens is 43 formed into the single cylindrical lens or group of cylindrical lenses to obtain the high numerical aperture, together with the first lens 41, and the thin metal film 42 is deposited on a lower flat surface of the second lens 43. The thin metal film 42 is formed of a metal material such as Au and Ag.
    In addition, the SPR sensing portion 40 may include the second lens 43 whose function is to focus a portion of the polarized divided light from beam splitter 30 and which is formed into the single cylindrical lens or group of cylindrical lenses to obtain the high numerical aperture together. with the first lens 41, the glass substrate (not shown) provided on a underside of the second lens 43 to be deposited with the thin metal film 42, and a matching refractive index material (not shown) which is applied between the second lens 43 and the glass substrate (not shown), to match a refractive index of the second lens 43 and a refractive index of the glass substrate (not shown) with each other.
    As another example shown in Fig. 4, the SPR sensing member 40 may include an integrated lens, the glass substrate, and the matching refractive index material. the SPR sensing portion 40 includes a third lens 44, which has functions for focusing a portion of the polarized divided light from the beam splitter 30 and which is formed into the single cylindrical lens or group of cylindrical lenses, the glass substrate 45 which is provided on an underside of the third lens 44 to be deposited with the thin metal film 42, and a matching refractive index material 46 which is applied between the third lens 44 and the glass substrate 45 to match a refractive index of the third lens 44 and a refractive index of the glass substrate 45 to each other.
    Here, matching refractive index oil and thin film are used as matching refractive index material 46. Preferably, the glass substrate has been deposited with the thin metal film 42, a structure which can be easily replaced with a new one. The task of the matching refractive index material 46 is to increase a maximum incident angle of light through the third lens 44. In cases where the matching refractive index material 46 is not used, since the total reflection occurs in the air, it is impossible to perform the SPR measurement.
    If a portion of the polarized divided light from the beam splitter 30 is linearly focused by the third lens 44, the focused light is incident on the glass substrate 45 of the matching refractive index material 46, and the incident polarized light is focused on the thin metal film 42 deposited on the underside. of the glass substrate 45 and in contact with the multi-channel flow unit 1. If a concentration, thickness or refractive index of the thin biofilm 1a changes in the multi-channel flow unit 1, the SPR ratio changes and the light is reflected and emitted to the glass substrate 45.
    And the emitted light passes through the matching refractive index material 46 and is then passed to the third lens 44. The light directed toward the third lens 44 passes through beam splitter 30 and is then detected by the analyzer 50.
    The lens used in the present invention has a high numerical objective lens aperture, a SIL lens and the like.
    Here, the maximum incident angle of the light incident on the lens is determined by a numerical aperture NA of the lens and a refractive index n of a medium. 10 15 20 25 30 537 033 emax: sin _1 (L1) I In the present invention, it is possible to simultaneously measure SPR and the ellipsometric phase change in accordance with the change in angle and wavelength by using a vertical illumination beam beam elliptometer which utilizes a multiple incident angle measurement method and the SPR sensing member 40 deposited with a thin metal film. (or a high numerical lens aperture, a matching refractive index material, a glass substrate deposited with a thin metal film), and it is also possible to measure a conjugation property and a dynamic conjugation property of the biomaterial in real time.
    The task of the analyzer 50 is to polarize the light which is reflected from the thin metal film 42 and passed through the objective lens and the beam splitter 30 and then detected the polarized light.
    The task of the optical detector 70 is to detect the amplitude and phase of the polarized light detected by the analyzer 50. Herein, as shown in fig. 3, the optical detector 70 detects the light which has been reflected at different angles. One axis of a second dimensional optical detector detects a signal according to an angle, and the second axis thereof detects a signal of the second channel according to a position in the same way. Therefore, the present invention can detect multi-channel signals.
    The processing unit 80 processes the SPR and the ellipsometric phase change detected by the optical detector 70.
    In the processing method, an ellipsometric coefficient 1/1, A is calculated from the principle that the ellipsometry which has a polarizer sample analyzer (PSA) or polarizer sample compensator analyzer (PSCA) type structure in each device device (the unit pixel in case of CCD).
    As shown in fig. 3, it is possible to obtain information about the angle from a shaft in a second dimensional unit device and the channel position from the second shaft thereof.
    The ellipsometric coefficient 1/1 which is relevant for the amplitude is used to calculate the angular change in the SPR measurement and denotes a minimum value in the optimum resonance ratio. An amount of motion of the angle corresponds to an amount of motion of the SPR angle, and a change in a value of 1/1 can also be used to calculate the resonant angle. The ellipsometric coefficient 1/1 which is relevant for the amplitude provides information such as the change in the SPR angle, and A denoting the phase change can be used to perform accurate SPR measurements.
    Phase change A is sensitively changed under optimal SPR conditions. In other words, the phase change is maximum in optimal SPR conditions. Therefore, if the change in a phase value in optimal SPR conditions is measured, it can be used in the adsorption dynamic property of different biomaterials (eg the adsorption dynamic property of a low molecular weight material which is used as a new drug candidate, etc.), which requires a accurate measurement, and it can also be used in calculating and determining the SPR angle by simultaneously using the amplitude and phase. In particular, when a low molecular weight material, used as a new drug candidate, is conjugated to the target protein, it is required to provide the extremely accurate precision measurement. In this case, the phase measurement may show better properties than the conventional measurement of reflectivity. In the ellipsometric equation, a complex reflection coefficient ratio p is a reflection coefficient ratio (rs, rp) with respect to p-wave and s-wave, and can be expressed as follows.
    In addition, it is preferable to further provide a collimator 100 which is arranged between the light source 10 and the polarizer 20 to convert the emitted light from the light source 10 to parallel light and then transmit the parallel light. the light of the polarizer 20.
    Furthermore, it is preferable to further provide a compensator 90 which is arranged between beam splitter 30 and the SPR sensing part 40 or between beam splitter 30 and the optical detector 70 to compensate the divided light from beam splitter 30.
    As shown in fig. 2 and 4, there may be further provided a means (not shown) for rotating the polarizer 20 or the analyzer 50 in the vertical direction to a light direction or for modulating the polarization of the light so that the light detected by the analyzer 50 can be detected at each incident angle of the optical the detector 70. Similarly, a rotating means (not shown) may be further provided for rotating the compensator 90 in the vertical direction to the light direction, so that the light compensated by the compensator 90 can be detected at each incident angle of the analyzer 50. 537 033 The optimum SPR ratio easily changes the wavelength and angle of the light according to a thickness of the thin metal film 42 deposited on the glass substrate.
    Therefore, if an ellipsometric structure in which one of the polarizers, the analyzer and the compensator of the SPR sensing part 40 is rotated is used, it is possible to perform the measurement in the optimum SPR ratio without degrading the precision which may be caused by the error. of a thickness or physical property, when the thin metal film 42 is made.
    In a method of measuring the angle according to the change in the wavelength which utilizes the ellipsometry where one of the analyzer 50 and the compensator 90 of the SPR sensing part 40 is rotated, it is possible to perform the measurement in the optimum SPR ratio which can be changed according to with a processing ratio.
    The phase measurement which uses the ellipsometry is most sensitive in the optimal SPR ratio. However, since the refractive index and thickness of the thin metal element 42 which is an important part of the SPR sensor can be easily changed in accordance with a manufacturing operation, it is possible to easily obtain the optimal SPR ratio within a measurement angle and a wavelength range of the light source used. and thus it is possible to simultaneously use the advantage of SPR and the ellipsometry.
    A reference number 110 which is not described is a monochromator.
    Embodiments (measurement of change in SPR angle according to wavelength) The change in SPR angle according to wavelength has been measured and shown in Figs. 5 and 6, where the wavelength was 750 to 1100 nm, the lens was formed of BK7, the thin the metal film was formed of Au, a thickness of the thin metal film was 45 nm and a refractive index of the buffer solution was 1,333.
    Fig. 5 shows that the SPR angle is changed according to a wavelength and Fig. 6 shows that a slope of the phase change is changed according to a wavelength and it is also possible to select the angle and wavelength in which the slope of the phase change is maximum. 12
    权利要求:
    Claims (12)
    [1]
    A clear surface plasmon resonance sensor utilizing beam profile ellipsometry, comprising: a vertical illuminating beam beam elliptometer in which the light is polarized, a portion of the polarized light is focused into a thin metal film having multiple channels by utilizing an objective lens portion, and then it is detected. polarized light which was reflected from the thin metal film to measure an ellipsometric phase change; a surface plasmon resonance (SPR) sensing portion which is provided on the objective lens portion of the beam ellipsometer to generate surface plasmon resonance (SPR) in accordance with an angular change of the polarized light; and a multi-channel flow unit which supplies a buffer solution containing a biomaterial bond to or separating from the thin metal film which generates the surface plasmon, wherein SPR and the ellipsometric phase change by change in an angle and a wavelength are detected simultaneously, wherein the SPR sensing part comprises: a first lens which is a cylindrically shaped converging lens for linearly focusing a portion of the polarized light; and a second lens which is a single cylindrical lens or a group of cylindrical lenses in which the thin metal film is deposited on a terminating lens surface, to obtain a high numerical aperture together with the first lens.
    [2]
    The multichannel surface plasmon resonance sensor of claim 1, wherein the vertical illumination beam beam ellipsoometer comprises a light source; a polarizer for polarizing the emitted light from the light source; a beam splitter for dividing the polarized light from the polarizer; an objective lens for focusing a portion of the polarized divided light from beam splitters into a thin metal film having multiple channels; an analysis means for polarizing the light which is linearly reflected from the thin metal film and passed through the beam splitter, and for detecting the polarized light; an imaging module for imaging the light detected by the analyzing means; an optical detector for detecting amplitude and phase of the light 137 15 20 25 30 35 537 033 as imaged by the imaging module; and a processing device for processing the ellipsometric phase change which has been detected by the optical detector.
    [3]
    The multichannel surface plasmon resonance sensor of claim 2, wherein the light source is one of a light source for emitting a short wavelength or a wavelength band of an ultraviolet beam, visible beam or an infrared beam, and a wavelength variable light source of a laser wavelength variable.
    [4]
    The multi-channel surface plasmon resonance sensor of claim 2, wherein the analyzing means is one of an analyzer, a single polarizing beam splitter, a beam splitter and a polarizer.
    [5]
    The multi-channel surface plasmon resonance sensor of claim 1, wherein the SPR sensing member comprises: a third lens which is formed into a single cylindrical lens or a group of cylindrical lenses for linearly focusing a portion of the polarized light; a glass substrate provided on an underside of the third lens and of which an underside is deposited with the thin metal film; and a matching refractive index material which is applied between the third lens and the glass substrate to match a refractive index of the third lens and the refractive index of glass substrates with each other.
    [6]
    The multi-channel surface plasmon resonance sensor of claim 2, further comprising means for rotating the polarizer or analyzing means in a vertical direction to a light direction or for polarizing modulating the light, so that the multi-channel information depending on spatial variation of linear light detected by the analyzing means can be detected at each incident angle of the optical detector.
    [7]
    The multichannel surface plasmon resonance sensor of claim 2, further comprising a compensator which is arranged between the beam splitter and the SPR sensing part or between beam splitters and the optical detector to compensate for the divided light from beam splitters.
    [8]
    The multichannel surface plasmon resonance sensor of claim 7, further comprising a rotating means for rotating the compensator in a vertical direction to a light direction, so that the light compensated by the compensator can be detected at each incident angle of the analyzer to provide multi-channel information in accordance with a change in position.
    [9]
    The multichannel surface plasmon resonance sensor of claim 2, further comprising a collimator disposed between the light source and the polarizer to convert the light emitted from the light source into parallel light and then transmit the parallel light to the polarizer.
    [10]
    The multichannel surface plasmon resonance sensor of claim 1, wherein, the SPR sensing member comprises: a first lens which is a cylindrically shaped converging lens for linearly focusing a portion of the polarized light; a second lens which is a single cylindrical lens or a group of cylindrical lenses to obtain a high numerical aperture together with the first lens; a glass substrate provided on an underside of the second lens and of which an underside is deposited with the thin metal film; and a matching refractive index material which is applied between the second lens and glass substrate to match a refractive index of the second lens and a refractive index of glass substrates with each other.
    [11]
    The multichannel surface plasmon resonance sensor of claim 1, wherein the converging lens is formed into one of a biconvex shape, a plano convex shape and a meniscus shape.
    [12]
    The multichannel surface plasmon resonance sensor of claim 10 wherein the converging lens is formed into one of a biconvex shape, a plano convex shape and a meniscus shape. 15
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    CN109883553B|2019-03-14|2020-01-21|上海精测半导体技术有限公司|Polarization measuring device and polarization measuring method|
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    申请号 | 申请日 | 专利标题
    KR1020080120134A|KR101012056B1|2008-11-28|2008-11-28|Multi-channel surface plasmon resonance sensor using beam profile ellipsometry|
    PCT/KR2009/007083|WO2010062149A2|2008-11-28|2009-11-30|Multi-channel surface plasmon resonance sensor using beam profile ellipsometry|
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